METHOD AND DEVICE FOR TESTING DEVICE AND CARD FOR MEASUREMENT

摘要

PROBLEM TO BE SOLVED: To measure transmission characteristics or reception characteristics of radio waves to an IC chip in a wafer state. SOLUTION: A device tester 10 is provided with an analog signal generator 12 and an analog signal analyzer 14 and further is provided with a transmitter 20 and a receiver 22. An antenna 26 for measurement is connected via a connector 24 to the transmitter 20 and the receiver 22. A probe card 30 is provided with a probe 32 which is in contact with the measuring pad of the IC chip and an antenna 34 for IC for a connection to the IC chip. When testing an analog signal concerning a device to be measured, changeover switches 36 and 38 are switched so as to connect the probe 32 to coaxial cables 16 and 18. When testing the transmission/reception of radio waves concerning the device to be measured, the changeover switches 36 and 38 are switched so as to connect the probe 32 to the antenna 26 for measurement.