| 摘要 |
<p>PROBLEM TO BE SOLVED: To uniformarize distribution of density of organic substance gas in a container in a short time to activate by providing with a means for introducing and exhausting gas containing organic substances in a container where a substrate is installed on the inside thereof, a heating means for the substrate, a means for heating before the gas containing organic substances is introduced in the container, and a means for applying voltage to a pair of electrodes. SOLUTION: A substrate provided with an electron emitting element is installed in a container 11. Organic system impurities and oxygen, etc., can be removed by the inside of the container 11 by using an exhauster, or substituting with nitrogen and inert gas, etc. The effect to remove unnecessary gas for activation and to promote an activated reaction is achieved by heating the substrate. The amount of gas containing organic substances and dilution gas such as He is controlled with a gas-introducing controller 15. This mixed gas is heated with a heater 17 to introduce in the container. When a heating temperature of the mixed gas is the same as a substrate temperature, the temperature distribution on the surface of the substrate becomes small to activate uniformly. It is desirable to remove moisture which obstructs activation.</p> |
