PIN HOLE DETECTOR FOR MEASURING INTENSITY DISTRIBUTION OF ELECTRON BEAM

摘要

PROBLEM TO BE SOLVED: To provide a pin hole detector capable of measuring the intensity distribution of electrons with sufficient accuracy by preventing the pin hole from causing rear scattering of the electrons. SOLUTION: An illumination intensity distribution, measuring device for an electron beam projection exposure device is provided with: a leticle BR provided with a sub-field; a pin hole plate that is arranged on the image surface of the electron beam projection exposure device and formed of a block of a material having a high-aspect-ratio pin hole PH and a small atomic number; a means SC for detecting electrons that pass the pin hole; and a means for moving and scanning the pin hole in relation to a fixed electron intensity distribution, or a means DY for scanning the electron intensity distribution in relation to the pin hole when retained at a fixed position.