| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform both observation by a scanning electron microscope and observation by a photo-electron microscope by using a single device without moving a sample. SOLUTION: When this device is used as a scanning electron microscope, a lens barrel 2 is kept at the same potential as that of a sample 4, and a negative potential is applied to an electron gun 1. The electrons emitted from the electron gun 1 are converged by electron lenses 13, 14 of the lens barrel 2 and scanned on the sample 4 by deflection coils 15, 16. The secondary electrons from the sample 4 are detected and converted into an electric signal by a secondary electron detector 5, and displayed on a secondary electron image display means 8. When the device is used as a photo-electron microscope, a positive acceleration voltage is applied to the lens barrel 2. An ultraviolet-ray is applied on the sample 4 from a mercury lamp 6, and the image of the photo-electrons from the surface of the sample 4 is focused on a photo-electron detector 17 by the electron lenses 13, 14. The focused image of the photo-electrons is converted into an electric signal and displayed on a photo-electron image display means 9.</p> |
