| 摘要 |
PROBLEM TO BE SOLVED: To obtain a gauge block which is superior in resistance to abrasion and resistance to corrosion, whose size does not changeover aging, and which can be inexpensively manufactured by coating the surfaces of a gauge block main body with TiN films. SOLUTION: A gauge block main body 1 is a steel base material not subjected to quench hardening, and is worked on so that the interval between surfaces A0 to be reference surfaces may have a size D-d1 slightly smaller than a desired size D, allowing for the afterward formation of TiN films. Next, Tin films 2 are formed on the surfaces of the gauge block main body 1 through the use of a multi-arc system ion plating device. A substrate holder is a self- revolving holder with a main holder and a sub-holder, and the gauge block main body 1 is placed on the sub-holder with the reference surfaces A0 perpendicular to the sub-holder to form TiN films. TiCl4 gas is, for example, used as raw material gas, converted into a plasma by an ion source, and supplied with gaseous nitrogen and gaseous hydrogen to synthesize TiN.
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