| 摘要 |
PROBLEM TO BE SOLVED: To realize a manufacturing method for a surface-treated article excellent in adhesion between a thin film and a base material under a pressure in the vicinity of atmospheric pressure without requiring excessive equipment investment. SOLUTION: First, treatment gases 90, 91 are introduced into between counter electrodes 30, 31 provided with solid dielectrics 60, 61 on at least one-side counter faces such that a pressure between the counter electrodes 30, 31 becomes almost atmospheric pressure. Then, discharge plasma is generated by applying a pulsed electric field between the counter electrodes 30, 31, while a base material 11 provided between the counter electrodes 30, 31 is plasma-treated. In this manufacturing method for a surface-treated article, the treatment gases 90, 91 are continuously introduced into between the counter electrodes 30, 31 from two sides of the base material 11. |
