| 摘要 |
PROBLEM TO BE SOLVED: To precisely connect an optical waveguide pattern to an optical fiber on a mating connection side. SOLUTION: A recess 4 is formed in an optical waveguide pattern forming area of a silicon substrate 2, then a lower part clad layer 5 is formed in the recess 4, a surface of the clad layer 5 is made flat to form a plane consistent with a surface of the silicon substrate 2, an alignment marker 3 serving as a reference for forming an optical waveguide pattern 7 is formed thereafter on the surface of the substrate 2, the optical waveguide pattern 7 is formed in an upper part side of the clad layer 5 using the reference the marker 3, the upper part side of the pattern 7 is covered with an upper clad layer 8 to form an optical waveguide layer, then the optical waveguide layer in a V-groove forming area is removed to expose the surface of the silicon substrate 2, and a V-groove 9 is formed thereafter on a surface side of the exposed substrate 2 using the alignment marker 3 as the reference. |
