| 摘要 |
PROBLEM TO BE SOLVED: To reduce nonlinearity of a capacitance value to a minimum, while reducing charge noise. SOLUTION: A plurality of capacitors 10a, 10b which are connected in series are connected to an inversion input terminal of an operational amplifier 20. Both electrodes of the capacitors 10a, 10b are composed of a polysilicon closer to a substrate, and a polysilicon more distant from the substrate. Mutual electrode connection is performed by using different polysilicon, i.e., second polysilicon of the capacitor 10a and first polysilicon of the capacitor 10b. Thereby a capacitor circuit, in which nonlinearity of a capacitance value is reduced, while charge noise is reduced can be realized.
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