| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning charged particle beam device capable clearly performing image observation even when a charged region exists on the surface of a sample. SOLUTION: The intensity of a secondary electron signal is reduced according to the intensity of an absorption current by means of a computing unit 17. Such a computation can be accomplished by using, for instance, an adder as the computing unit 17. As a result, when a charged region is scanned by a primary electron beam, the absorption current is reduced, and a secondary electron detection signal is abnormally intensified, but the intensity of the secondary electron detection signal is reduced according to the small value of the absorption current. Therefore, the luminance in the charged region of the sample is abnormally intensified, so that the observation of the whole image on a cathode-ray tube 15 is prevented from being hindered.
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