| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle source capable of stably providing electron or ion emission. SOLUTION: In this charged particle source structural body comprising a chip 4 for emitting charged particles, a pair of heaters 5 for holding and heating the chip 4, and a pair of conductive posts 3 for holding the chip 4 through the heaters 5, a recessed part in which a part of the heater 5 can be buried is formed in a surface abutting on the heater 5 of each of the conductive posts 3.
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