FILM FORMING DEVICE

摘要

A clamp mechanism (35) which holds an untreated body (W) put on a loading table (22) of a treatment container (16) for film forming treatment capable of performing vacuuming, comprising a ring-shaped clamp ring main body (38) in contact with the peripheral edge part of the untreated body and an energizing member (40) energizing the clamp ring main body downwards, wherein a contact surface (38A) of the clamp ring main body on the inner peripheral side is formed as a tapered surface tilted downwards at a specified angle theta relative to a horizontal toward the outward radial direction of the untreated body, and the specified angle is set within the range of 2 to 15 DEG and the overlapped amount of the contact surface with the peripheral edge part of the untreated body is set within the range of 0.7 to 3.5 mm, whereby the unnecessary formation of adhering film on the peripheral edge part and near the side surface of the untreated body is suppressed properly.