发明名称 DRILL AND DRILLING METHOD, STAGE WORKING METHOD, AND METHOD OF MANUFACTURING EXPOSURE DEVICE
摘要 A drill and drilling method which are used to drill a deep hole having a relatively small diameter, can drill the hole without froming a core, and also can machine the inner wall surface of the hole with high surface precision without necessitating an extra working process, wherein the drill has a shank (2) capable of rotating with a cylindrical center axis used as a rotating axis and a cutting part (4) having a rotating center part (22) of the shank (2) at least on the surface of which abrasive grains for cutting are stuck is provided at the tip of the shank (2), and the shank (2) is rotated to feed the cutting part (4) in the direction of the rotating shaft so as to press the surface of the cutting abrasive grain stucked rotating center part (22) against a workpiece in order to perform the drilling, whereby a hole can be made without forming the core during the drilling.
申请公布号 WO0043180(A1) 申请公布日期 2000.07.27
申请号 WO2000JP00122 申请日期 2000.01.13
申请人 NIKON CORPORATION;HANAI, SHIGERU 发明人 HANAI, SHIGERU
分类号 B23B51/00;B23B51/06;B24D3/00;B24D7/10;B24D7/14;B24D7/18;B28D1/04;B28D5/02;H01L21/027;(IPC1-7):B28D1/14;B23B47/00 主分类号 B23B51/00
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