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发明名称
TRANSDUCER HAVING TEMPERATURE COMPENSATION
摘要
<p>A capacitive pressure transducer (110) includes a conductive diaphragm (140) and a thermal compensation element with a different coefficient of thermal expansion from that of other elements within the pressure transducer.</p>
申请公布号
WO2000043745(A1)
申请公布日期
2000.07.27
申请号
US1999026557
申请日期
1999.11.10
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发明人
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