发明名称 |
LIFTING DEVICE FOR SUBSTRATES |
摘要 |
The aim of the invention is to make it as easy as possible to change a spindle in a lifting device (2) for substrates, which device comprises a support (10). To this end the support is configured such that it can be made to engage the substrate holder (25) by rotation or by pivoting.
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申请公布号 |
WO0043305(A1) |
申请公布日期 |
2000.07.27 |
申请号 |
WO2000EP00190 |
申请日期 |
2000.01.13 |
申请人 |
STEAG HAMATECH AG;ABENDSCHOEN, PETER;HERRMANN, STEFAN |
发明人 |
ABENDSCHOEN, PETER;HERRMANN, STEFAN |
分类号 |
B25J15/00;B25J15/06;G11B7/26;(IPC1-7):B65H1/14;B23Q7/10;B23Q7/00;H01L21/00 |
主分类号 |
B25J15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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