REACTION FORCE ISOLATION SYSTEM FOR A PLANAR MOTOR

摘要

The present invention provides a structure (60) for isolating the reaction forces generated by a planar motor (30). Specifically, the fixed portion (50) of the reaction motor (30), which is subject to reaction forces, is structurally isolated from the rest of the system in which the planar motor (30) is deployed. In accordance with one embodiment of the present invention, the fixed portion (50) of the planar motor (30) is separated from the rest of the system and coupled to ground. The rest of the system is isolated from ground by deploying vibration isolation elements (60). Alternatively or in addition, the fixed portion (50) of the planar motor (30) may be structured to move (e.g., on bearings) in the presence of reaction forces, so as to absorb the reaction forces with its inertia. In a further embodiment of the present invention, the fixed portion (50) of the planar motor (30) and the article (12) to be moved are supported by the same frame (52), with the fixed portion (50) of the planar motor (30) movable on bearings.