| 发明名称 |
LIFTING DEVICE FOR SUBSTRATES |
| 摘要 |
The aim of the invention is to make it as easy as possible to change a spind le in a lifting device (2) for substrates, which device comprises a support (10 ). To this end the support is configured such that it can be made to engage the substrate holder (25) by rotation or by pivoting.
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| 申请公布号 |
CA2359193(A1) |
申请公布日期 |
2000.07.27 |
| 申请号 |
CA20002359193 |
申请日期 |
2000.01.13 |
| 申请人 |
STEAG HAMATECH AG |
发明人 |
ABENDSCHON, PETER;HERRMANN, STEFAN |
| 分类号 |
B25J15/00;B25J15/06;G11B7/26;(IPC1-7):B65H1/14;H01L21/00;B23Q7/00;B23Q7/10 |
主分类号 |
B25J15/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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