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发明名称
Epitaxial growth method
摘要
申请公布号
EP0784106(B1)
申请公布日期
2000.07.26
申请号
EP19970100125
申请日期
1997.01.07
申请人
TOSHIBA CERAMICS CO., LTD.;TOSHIBA MACHINE COMPANY LIMITED
发明人
OHASHI, TADASHI;MITANI, SHINICHI;HONDA, TAKAAKI
分类号
C30B29/06;C23C16/24;C30B25/02;H01L21/205;(IPC1-7):C30B25/02
主分类号
C30B29/06
代理机构
代理人
主权项
地址
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