| 摘要 |
PURPOSE: A method for management of emergency in a management system of a semiconductor manufacturing equipment is provided to previously protect unexpected process failure and to automatically manage emergency in the equipment by accurately monitoring the emergency in real time after recovery of on-line communication. CONSTITUTION: In a first step(S10), determination is carried out whether communication between a host and a semiconductor manufacturing equipment is recovered or not, and when the result is Yes, emergency data is received from the manufacturing equipment. In a second step(S20), determination is carried out whether the equipment is in warning state or not through a search of the emergency data. In a third step(S30), when the result is warning state, determination is carried out whether the warning state is emergency or not. In a fourth step(S40), when the result is Yes, equipment control message including changed variable ID key value of the equipment is downloaded to the equipment, making the same OFF. In a final step(S50), when the result is Not, lot input signal is determined to exist and then warning message is downloaded to O/I PC(Operator Interface Personal Computer).
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