| 发明名称 |
SEMICONDUCTOR COMPONENT AND METHOD FOR THE PRODUCTION THEREOF |
| 摘要 |
<p>The invention relates to a semiconductor element with a polybenzoxalole-based polymer insulating layer. The invention also relates to a method for producing a semiconductor component whereby a polybenzoxalole-based polymer is used as a dielectric.</p> |
| 申请公布号 |
EP1021832(A1) |
申请公布日期 |
2000.07.26 |
| 申请号 |
EP19980954227 |
申请日期 |
1998.09.25 |
| 申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
SEZI, RECAI;SEBALD, MICHAEL;GROSS, GERHARD |
| 分类号 |
H01L21/768;H01L23/532;(IPC1-7):H01L23/532 |
主分类号 |
H01L21/768 |
| 代理机构 |
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| 主权项 |
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| 地址 |
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