| 摘要 |
<p>A fluid control device has formed in a valve main body a main channel (16) communicating with an inlet of a channel within a massflow controller (1), and a relatively long subchannel (38,18) and a relatively short subchannel (17,39) both communicating with the main channel (16). The process gas to be assure of high purity is passed through the relatively long subchannel. <IMAGE></p> |
