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发明名称
A method for producing a compound semiconductor for thin film
摘要
申请公布号
EP0534459(B1)
申请公布日期
2000.07.26
申请号
EP19920116441
申请日期
1992.09.25
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
KOHIKI, SHIGEMI;NEGAMI, TAKAYUKI;NISHITANI, MIKIHIKO;WADA, TAKAHIRO
分类号
H01L31/032;H01L31/068;(IPC1-7):H01L31/032
主分类号
H01L31/032
代理机构
代理人
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