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发明名称
Surface inspection using the ratio of intensities of S- and P-polarized light components of a laser beam
摘要
申请公布号
GB0013801(D0)
申请公布日期
2000.07.26
申请号
GB20000013801
申请日期
1999.04.06
申请人
ADVANTEST CORPORATION
发明人
分类号
G01B11/30;G01N21/21;G01N21/94;G01N21/95
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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