FLEXIBLE THIN FILM CAPACITOR AND METHOD FOR PRODUCING THE SAME

摘要

PURPOSE: It is an object of the present invention to provide a high-quality and highly reliable flexible thin film capacitor that results in a thin mounted substrate on which the components are mounted, and is flexible so that it hardly is broken when being bent. Furthermore, it is another object of the present invention to provide a method for producing a flexible thin film capacitor having such excellent characteristics. CONSTITUTION: According to a flexible thin film capacitor of the present invention, an adhesive film(2) is formed on a substrate(1) composed of at least one selected from the group consisting of an organic polymer and a metal foil, and an inorganic high dielectric film(4) and metal electrode films(30) are formed thereon. A metal oxide adhesive film can be used as the adhesive film 2. The adhesive film(2) is formed in contact with the inorganic high dielectric film(4) and at least one of the metal electrode films(3).