CONTINUOUS PLASMA SURFACE TREATMENT OF SHEETLIKE MATERIAL AND APPARATUS THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a method by which a stable plasma region uniform over the whole discharge region is formed without causing local arc discharge and the plasma surface treatment of a sheetlike substrate having flexibility can continuously and stably be carried out under atmospheric pressure. SOLUTION: This method is a continuous plasma treating method for carrying out the surface treatment of a sheetlike material 7 by applying an AC electric field across opposite electrodes under approximately atmospheric pressure, generating a discharge plasma and continuously feeding and moving the sheetlike material 7 through a space between the opposite electrodes. The opposite electrodes are composed of an electrode 2 having a convex surface and an electrode 3 opposing at a prescribed interval and having a concave surface. The sheetlike material 7 is moved while being brought into close contact with the electrode 2 having the convex surface and a gas for the plasma surface treatment is introduced from plural ventilating holes 31 provided in the electrode 3 having the concave surface.