发明名称 PRODUCTION OF POROUS THIN FILM AND FUNCTIONAL THIN FILM
摘要 PROBLEM TO BE SOLVED: To constitute a functional thin film from a titanium oxide thin film and a porous thin film. SOLUTION: A thin film 14 containing an organic compound is formed on the surface of a titanium oxide thin film 13, is irradiated with ultraviolet rays and the organic compound is decomposed and removed to form a hydrophilic porous thin film 15 on the surface of the titanium oxide film 13. Since the surface of the titanium oxide thin film 13 is exposed to the bottom of holes 19 of the porous thin film 15, a functional thin film 2 having both the photocatalytic function of the titanium oxide thin film 15 and hydrophilic nature of the porous thin film 14 is obtained.
申请公布号 JP2000203886(A) 申请公布日期 2000.07.25
申请号 JP19990003934 申请日期 1999.01.11
申请人 ULVAC JAPAN LTD 发明人 NEGISHI TOSHIO
分类号 C03C17/34;B01J35/02;(IPC1-7):C03C17/34 主分类号 C03C17/34
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