发明名称 Field emission device having a focusing structure and method of fabrication
摘要 A field emission device (400) includes a substrate (414), a cathode (415) disposed on substrate (414), a dielectric layer (418) disposed on cathode (415) and defining an emitter well (421) and further defining a focusing well (448), an electron emitter (420) disposed within emitter well (421) and connected to cathode (415), a gate electrode (422) disposed on dielectric layer (418), and a focusing structure (450) disposed within focusing well (448) and connected to cathode (415) for focusing an electron beam (430) emitted by electron emitter (420). A method for fabricating field emission device (400) includes directing a second collimated vapor beam (461) toward focusing well (448) subsequent to forming an encapsulating layer (478) over emitter well (421), thereby forming focusing structure (450).
申请公布号 US6094001(A) 申请公布日期 2000.07.25
申请号 US19980111503 申请日期 1998.07.07
申请人 MOTOROLA, INC. 发明人 XIE, CHENGGANG
分类号 H01J3/02;(IPC1-7):H01J1/02 主分类号 H01J3/02
代理机构 代理人
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