METHOD OF FORMING DIELECTRIC THIN FILM PATTERN AND METHOD OF FORMING LAMINATE PATTERN COMPRISING DIELECTRIC THIN FILM AND CONDUCTIVE THIN FILM

摘要

PURPOSE: A method of forming a laminate pattern and dielectric thin film pattern is provided to form the laminate pattern composed of a low loss dielectric thin film and a conductor thin film and constituting a high frequency device such as a high frequency transmission line, a high frequency resonator, a high frequency capacitance element by using lift-off technology. CONSTITUTION: A method of forming a dielectric thin film pattern comprises the steps of depositing a dielectric thin film on the substrate, forming a resist pattern thereon using a vapor deposition method and removing the resist pattern to form a patterned dielectric thin film, wherein a material used for the dielectric thin film is at least one of CeO2, Sm2O3, Dy2O3, Y2O3, TiO2, Al2O3, and MgO.