发明名称 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
摘要 <p>PURPOSE: A semiconductor device and a fabrication method thereof are provided to suppress the leakage current, and reduce the leakage current from the insulating layer of a capacitor and increase the capacity of the capacitor. CONSTITUTION: A semiconductor device comprises a stack type capacitor cell including: a convex bottom electrode formed on a semiconductor substrate(11); a capacitor insulating layer formed to cover the surface of the bottom electrode; and a top electrode formed on the capacitor insulating layer. And, at least one layer of gate cap layer(15) is formed between an end part of the upper surface of the bottom electrode and the capacitor insulating layer, and the gate cap layer is formed with an insulator.</p>
申请公布号 KR20000048277(A) 申请公布日期 2000.07.25
申请号 KR19990059592 申请日期 1999.12.21
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HIEDAGAZHIKO;EGUZIGAZHIRO
分类号 H01L27/10;H01L21/02;H01L21/8242;H01L27/108;(IPC1-7):H01L27/10 主分类号 H01L27/10
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