POLISHING PAD AND METHOD FOR MAKING POLISHING PAD WITH ELONGATED MICROCOLUMNS

摘要

PURPOSE: A polishing pad with elongated microcolumns is provided to uniform the planarity of the surface of the wafer. CONSTITUTION: A polishing pad(42) for use in chemical-mechanical planarization (CMP) of semiconductor wafers includes a multiplicity of elongated microcolumns(48) embedded in a matrix material body. The elongated microcolumns(48) are oriented parallel to each other and extend from a planarizing surface used to planarize the semiconductor wafers. The elongated microcolumns(48) are uniformly distributed throughout the polishing pad(42) in order to impart uniform properties throughout the polishing pad. The polishing pad can also include elongated pores(50) either coaxial width or interspersed between the elongated microcolumns(48) to provide uniform porosity throughout the polishing pad(42).