| 发明名称 |
WAFER SLIP PREVENT CONSTRUCTION OF SEMICONDUCTOR BOAT |
| 摘要 |
PURPOSE: A wafer slip prevent construction of a semiconductor boat provides a quartz boat for bath type PR strip device preventable breakage of wafers. CONSTITUTION: A wafer slip prevent construction of a semiconductor boat comprising a boat body(10) having upper and lower support plate(11,12). A support rod(13) having a wafer safe arrival groove(13a). A heat expansion member(100) is mounted on each wafer safe arrival groove(13a), boat stage(20), boat elevator(30).
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| 申请公布号 |
KR20000046798(A) |
申请公布日期 |
2000.07.25 |
| 申请号 |
KR19980063525 |
申请日期 |
1998.12.31 |
| 申请人 |
HYUNDAI MICRO ELECTRONICS CO., LTD. |
发明人 |
SHIN, YU SIK |
| 分类号 |
H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/68 |
| 代理机构 |
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代理人 |
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| 地址 |
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