发明名称 Vacuum heating furnace with tapered portion
摘要 A vacuum heating furnace comprises a translucent container for retaining a heated object and a heating light source for heating a heated object retained in the translucent container. The translucent container has on its surface a tapered portion to receive transmitted light totally reflected on the inner surface of the translucent container at an angle smaller than a critical angle.
申请公布号 US6093911(A) 申请公布日期 2000.07.25
申请号 US19980083055 申请日期 1998.05.22
申请人 HITACHI, LTD.;KOKUSAI ELECTRIC CO LTD 发明人 KAWADA, HIROKI;WATANABE, TOMOJI;TSUMAKI, NOBUO;MIYATA, TOSHIMITSU
分类号 H01L21/22;H01L21/00;(IPC1-7):H01L21/22 主分类号 H01L21/22
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