| 摘要 |
PURPOSE: A method for direct recording data by a charged particle line, a method for authenticating direct recording data by a charged particle line, a method for displaying direct recording data by charged particle line, and an exposing apparatus are provided to increase stability. CONSTITUTION: A method for direct recording data by a charged particle line includes following steps. At the first step, a plurality of patterns of a cell projection formed at an aperture are stored in a register, and a designed data cell is compared with the cell projection stored in the register. At the second step(Q2), whether any cell corresponding to an arbitrary cell in the designed data exists in the cell projection stored in the register. At the third step(Q3), the cell projection is extracted when the corresponding cell exists. At the forth step(Q5), the extracted cell projection is displayed as direct recording data. |
