METHOD FOR PRODUCING INDIUM-TARTAR-OXIDE SINTERED MATERIAL OF HIGH DENSITY

摘要

PURPOSE: A method for producing indium-tartar-oxide sintered material of high density having the excellent characteristic as a sputtering target and appropriated on an industry is provided to sinter after forming an indium-tartar-oxide powder. CONSTITUTION: A powder contained an indium, a tartar and oxygen is formed. The formed material is sintered on air contained oxygen gas. Thereby an indium-tartar-oxide sintered material is produced. A halogen content of the powder is under 0.02wt%. A concentration of oxygen in the air contained oxygen gas is over 90% during sintering. A partial pressure of moisture contained in the air contained oxygen gas is under 800Pa during sintering and is maintained at 1500-1650°C over 1hour to sinter the formed material.