| 摘要 |
PURPOSE: A two-piece clamp ring assembly is provided to improve utilization efficiency thereof. CONSTITUTION: A two-piece clamp ring assembly(10) includes an annular outer ring, i.e., a base ring(12), and an annular inner ring, i.e., a fixing ring(14). The base ring(12) has at least one interlocking projections(18) located on inner side(12A) thereof, whereas the fixing ring(14) has at least one arched flanges(14E) and at least one arched grooves(14F) located on outer side(14B) thereof. The arched grooves(14F) are complementarily shaped to the interlocking projections(18) so that the base ring(12) and the fixing ring(14) can be interlocked together by connecting the interlocking projections(18) and the arched grooves(14F). Furthermore, the base ring(12) has a plurality of through holes downwardly formed from an upper face(12C) thereof, so that the base ring(12) can be conjoined to an underlying base plane by inserting fastening members into the through holes. In addition, the fixing ring(14) further has a plurality of supporting projections(26) formed on inner side(14A) thereof to support an object such as a wafer.
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