| 摘要 |
PURPOSE: An infrared ray bolometer is provided to prevent a bending of the absorbing portion having a three-layer structure. CONSTITUTION: An infrared ray bolometer(201) comprises a driving substrate level(210) which has a substrate(212) on which an integrated circuit is formed and a connecting terminal(214), a supporting level(220) having a supporting bridge(240) formed of silicone nitride, a post(270), and an absorbing level(230) which has an absorbing portion(295) made of SiO2 and SiOxNy and an element of a bolometer. The absorbing portion is comprised of a middle layer(295b) which encapsulates the element of the bolometer and is made of SiO2, an upper layer(295c) and a lower layer(295a) which are respectively formed at an upper and lower side of the middle layer. The upper and lower layers are made of a same material.
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