| 摘要 |
PROBLEM TO BE SOLVED: To reduce the generation of particles and arcing and to attain the improvement of the quality of the product and the stabilization of the operation by joining plural target members to a backing plate, moreover providing gradient faces in the divided parts and continuously changing the height of sputtering faces. SOLUTION: A sputtering target is multi-divided, and plural target members 12 and 13 are joined to the surface of a backing plate 11 by a joining agent. At this time, the height of the target 12 for the center part delay in the sputtering rate is made low, the target 13 for edge parts high in consumption is made thick, and erosion is uniformly executed as the whole to improve the using efficiency of the target. Moreover, the sputtering faces 15 in the target 13 for edge parts are provided with gradient faces 16, height is continuously changed in the sputtering face 14 in the target 12 for the center part to eliminate the difference in level in the edge parts 19 and 20 in the divided parts 17. In this way, the sticking and peeling of the particles in the divided parts 17 are prevented, and also, the generation of arcing is effectively reduced.
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