OBJECT LENS ASSEMBLY AND METHOD OF MANUFACTURING OPTICAL HEAD AND PHASE COMPENSATING PLATE

摘要

PURPOSE: A method of manufacturing a phase compensating plate is provided to compensate the irregularity of polarization in using a solid immersion lens. CONSTITUTION: A resist layer is formed on a phase compensating plate material in order to manufacture a phase compensating plate. The resist layer is exposed by lights or electronic beams having exposure strength distribution to correspond to the desired surface shape of compensating plate. The resist layer is developed to have a surface shape corresponding to the desired surface shape of phase compensating plate. To manufacture a phase compensating plate with a curved face, the phase compensating plate material is etched along the resist layer to form the surface of material in the predetermined curved shape. Therefore, the phase compensating plate has different values according to the inclination angle of beams projected by phase difference.