| 摘要 |
The inventive three-level infrared bolometer includes an active matrix level, a support level, a pair of post and a absorption level. The active matrix level includes a substrate having an integrated circuit, a pair of connecting terminal and a protective layer covering the substrate. The support level includes a pair of bridges, each of the bridges being provided with a conduction line formed on top thereof, wherein one end of the conduction line is electrically connected to the respective connecting terminal. The absorption level includes a serpentine bolometer element surrounded by an absorber, and an infrared absorber coating formed on the absorber and having a rough surface. Each of posts includes an electrical conduit surrounded by an insulating material and is placed between the absorption level and the bridge, in such a way that the serpentine bolometer element is electrically connected to the integrated circuit through the electrical conduit, the conduction line and the connecting terminal.
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