发明名称 |
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a method for manufacturing the same are provided to minimize the reduction of efficiency of driving power of MOSFET(metal oxide field effect transistor). CONSTITUTION: A semiconductor device includes a first circuit and a second circuit. The first circuit is operated at a first voltage. The second circuit is operated at a second voltage which is lower than the first voltage. The gate insulation layer(27) for a transistor comprising the first circuit is made of SiO2. The gate insulation layer for a transistor comprising the second circuit is made of SiO2 plus nitrogen, which results in oxynitride(25) layer. The thickness of the gate insulation layer of the transistor comprising the first circuit is more than 5nm, and the thickness of the gate insulation layer of the transistor comprising the first circuit is less than 5nm.
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申请公布号 |
KR20000048314(A) |
申请公布日期 |
2000.07.25 |
申请号 |
KR19990060125 |
申请日期 |
1999.12.22 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
MATSOKA HUMIMOTO;DAKAHASI MINORU |
分类号 |
H01L29/78;H01L21/28;H01L21/336;H01L21/8234;H01L27/088;H01L29/51;(IPC1-7):H01L21/336 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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