REVOLVING SPEED DETECTING DEVICE FOR MAGNETIC LEVITATION ROTOR

摘要

PROBLEM TO BE SOLVED: To grasp accurately the rotating condition of a rotor. SOLUTION: The output signal of a rotation sensor circuit 10 on the basis of rotation sensors 8A and 8B and the output signal of a displacement sensor circuit 9 on the basis of an axial displacement sensor 7A and a radial displacement sensor 7R are subjected to a differential amplification, and thereby the output signal of the rotation sensor circuit 10 gets rid of influence of the vibration in case a vibration is generated in a rotor 2.