| 摘要 |
PROBLEM TO BE SOLVED: To reduce the electric power supplying amount, suppress the costs of the power supplying system, and lower the power consumption of the whole device. SOLUTION: A max. power consumption setting device 9 installed in a power supply device 1 to drive a turbo molecular pump receives externally a max. power consumption setting signal in accordance with the pump load, holds the set value of max. power consumption, and transmits this value to a power control part 8. The control part 8 makes setting of the frequency necessary for the driving speed of a motor 12 set previously, transmits it to an inverter 5 to convert into an AC power of a frequency necessary for the revolving speed of the motor 12, and supplies this power to the body 11 of turbo molecular pump for driving the motor 12. At the same time, a feedback signal from the motor 12 is transmitted to a revolving speed control part 10 to be compared with the signal from the setting device 9, and feedback signal for controlling the rotation and power is fed to the control part 8 so as to control the power to be supplied to the motor 12 and its revolving speed. Thereby the max. power supply amount for driving the turbo molecular pump can be reduced without impairing the original function of the turbo molecular pump.
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