发明名称 |
SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF AND METHOD FOR DESIGNING SEMICONDUCTOR DEVICE |
摘要 |
PURPOSE: A semiconductor device of SOI(Silicon On Insulator) structure is provided to reduce the substrate floating effect and to minimize the deterioration of isolation characteristics by the partial isolation region. CONSTITUTION: According to a method for fabricating a semiconductor device, each transistor formation region of a SOI(Silicon On Insulator) layer(3) is isolated by a partial oxide film(31) where a well region is formed on the bottom. And a P-type well region(11) is formed on a bottom layer of the partial oxide film isolating between NMOS transistors, and an N-type well region(12) is formed on a bottom layer of the partial oxide film isolating between PMOS transistors. The P-type well and the N-type well are formed adjacently each other. A body region is in contact with the adjacent P-type well region, and a wire layer formed on an interlayer insulation film(4) is connected with the body region electrically through a body contact installed on the interlayer insulation film.
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申请公布号 |
KR20000048319(A) |
申请公布日期 |
2000.07.25 |
申请号 |
KR19990060144 |
申请日期 |
1999.12.22 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
YAMAGUZIYASO;MAEGAWASIGETO;IPOSIDAKASI;IWAMAZDOSIAKI;MAEDASIGENOBU;HIRANOYUUIZI;MAZMOTODAKUZI;MIYAMOTOSYOIZI |
分类号 |
H01L21/762;H01L21/331;H01L21/8238;H01L21/84;H01L27/01;H01L27/08;H01L27/092;H01L27/12;H01L29/786;H01L31/00;(IPC1-7):H01L27/092 |
主分类号 |
H01L21/762 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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