| 摘要 |
<p>PROBLEM TO BE SOLVED: To suppress the generation of nitrogen oxides while scarcely increasing the consumption of a high-purity oxygen gas by using a low-purity oxygen gas as a scavenging gas for desorbing ozone in an adsorption cylinder in the former half of an ozone desorbing and supplying step and further the high-purity oxygen gas as the scavenging gas in the latter half thereof. SOLUTION: Oxygen gas containing ozone generated in an ozonizer 1 is introduced into an adsorption cylinder A or B cooled to a low temperature to adsorb the ozone on an adsorbent. The oxygen gas led out of the adsorption cylinder A or B is passed through passages 12a or 12b and 15, mixed with a high-purity oxygen supply source 2 which is a raw material, introduced into the ozonizer 1, circulated and reutilized. A scavenging gas is introduced from a passage 13a or 13b while heating the adsorption cylinder A or B after completing the adsorption to desorb the adsorbed ozone and accompany the scavenging gas with the ozone. Thereby, the ozone is supplied from passages 14a or 14b and 19 to the destination of consumption. A low-purity oxygen gas as the scavenging gas is introduced from an pressure swing adsorption type oxygen generator (an oxygen PSA) 3 in the former half of the ozone desorbing and supplying step and the high-purity oxygen gas is introduced from the supply source 2 in the latter half thereof.</p> |
