发明名称 COAXIAL DRIVE LOADER ARM
摘要 PURPOSE: A coaxial drive loader arm is provided for an article transfer mechanism for moving an article between first and second stations in a straight linear path with repeatability of movement and which mechanism is articulated by a drive which both rotates and vertically moves the mechanism about and along a given axis. CONSTITUTION: A transfer device (36) for moving substrates from one position to another comprises a base (51) and a drive arm (60) pivotally connected to one another about a first pivot axis. A drive is connected to the drive arm (60) for moving the drive arm (60) through an arc about the first pivot axis. The drive arm (60) has a free end which has a second pivot axis disposed parallel to the first pivot axis. The drive arm free end further including at least one article handling element (66) which is rotatably disposed about the second pivot axis. A belt (98) rotatably couples the at least one article handling element (66) to the base such that upon movement of the drive arm through the arc in a first rotary direction the at least one article handling element is rotated in the other opposite direction to move a substrate along a straight line path.
申请公布号 KR20000048510(A) 申请公布日期 2000.07.25
申请号 KR19997002410 申请日期 1997.08.29
申请人 BROOKS AUTOMATION, INC. 发明人 HOFMEISTER CHRISTOPHER;KILEY CHRISTOPHER
分类号 B25J9/06;B25J9/10;B65G49/07;H01L21/677;H01L21/687;(IPC1-7):B25J9/06 主分类号 B25J9/06
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