发明名称 METHOD AND DEVICE FOR TESTING SEMICONDUCTOR
摘要 PURPOSE: A method and device for testing a semiconductor is provided to test the semiconductor in high frequency operation specifications with lower price. CONSTITUTION: A method for testing a semiconductor device includes following steps. At the first step(s10), attachment state is formed attaching one of the semiconductor device assembly or individual semiconductor device on an attachment tape implemented on a tape holding member. At the second step(s11) the holding member is mounted on a position compensator which is configured to perform position recognition as well as position compensation by using image processing technology on the semiconductor device attached on the attachment tape. At the third step, on the individual semiconductor device position recognition(s17) and position compensation(s19) are performed. At the forth step, the semiconductor is pressed against a test contactor(s20). At the fifth step(s25), electrical characteristic test(s25) is performed on the semiconductor device.
申请公布号 KR20000047438(A) 申请公布日期 2000.07.25
申请号 KR19990028894 申请日期 1999.07.16
申请人 FUJITSU LIMITIED 发明人 ITASAKAGENZI;GAMIHUKUMOTODERUMI;AKASAKIYUZI;OOYAMANOBUO
分类号 G01R31/26;G01R1/04;G01R31/28;G01R31/311;H01L21/66;(IPC1-7):G01R31/26 主分类号 G01R31/26
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