发明名称 Grating assembly with bi-directional bandwidth control
摘要 A bidirectional bandwidth controlled grating assembly. A spring housing is connected to one of two end plates extending away from the lined surface of the grating. An adjustment rod threaded through the other end plate extends into the spring housing. Inside the spring housing in a preferred embodiment are two compression springs mounted between pressure surfaces in the housing and a piston which is fixed on the adjustment rod. The lined surface of the grating can be made more concave (or less convex) by screwing the rod in a direction into the spring housing compressing one of the springs to push the end plates apart and the surface can be made more convex (or less concave) by screwing the rod in a direction out of the spring housing compressing the other spring to pull the end plates toward each other.
申请公布号 US6094448(A) 申请公布日期 2000.07.25
申请号 US19990248466 申请日期 1999.02.11
申请人 CYMER, INC. 发明人 FOMENKOV, IGOR V.;ERIE, FREDERICK G.;ERSHOV, ALEXANDER I.
分类号 H01S3/08;G02B5/18;G03F7/20;H01S3/1055;H01S3/13;H01S3/137;H01S3/225;(IPC1-7):H01S3/08 主分类号 H01S3/08
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