| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid ejection element, and a manufacturing method thereof, in which a plurality of liquid chambers, inner electrodes and a piezoelectric part are constituted integrally without exposing the inner electrode to the inner wall face of the liquid chamber and liquid can be ejected efficiently and highly accurately. SOLUTION: An electrode 4 is formed on a ceramics green sheet 2a by printing and laminated with another ceramics green sheet 2b. A burn-out structure 10 of a carbon compound or wax for constituting a liquid chamber is arranged thereon and supplied with piezoelectric sludge to produce a ceramics green sheet 2c of specified thickness on which an upper electrode 5 is formed by printing. A plurality of such laminate sheets are laminated and integrated and then cut into specified size. Subsequently, it is fired and the burn-out structure 10 is burnt out to form a liquid chamber thus obtaining a multilayered piezoelectric liquid ejection element 1 where inner electrodes 4, 5 comprising a plurality of double layers, a plurality of liquid chambers and a piezoelectric part are integrated.
|
