| 摘要 |
PURPOSE: An infrared absorption bolometer with improved absorption efficiency is provided to achieving re-absorption of infrared ray permeating an absorption level by an infrared reflection film, thereby increasing the absorption efficiency of the infrared absorption bolometer. CONSTITUTION: An infrared absorption bolometer with improved absorption efficiency includes a driving substrate level(210) including a substrate(212), more than one pair of connecting terminals(214) formed on the substrate, and a protecting layer(216) covering the substrate, a supporting level(220) including more than one pair of supporting bents(240) having a conductive line(255) of which one end is electrically connected with a corresponding one connecting terminal, an absorption level(230) including an absorption band(295), bolometer elements(285) surrounded by the absorption band, and an infrared absorption coating(297) formed on a top surface of the absorption band, an infrared reflection film(270) formed under the absorption level, and at least more than one pair of posts(260) positioned between the supporting bents and the absorption level, surrounded with an insulating material and having an electric tube(262) for connecting the bolometer element with the conductive line electrically, wherein the bolometer elements of the absorption level are respectively connected with corresponding connecting terminals electrically via the electric tube and the conductive line. |
