| 摘要 |
PURPOSE: A method for manufacturing an infrared ray bolometer is provided to symmetrically achieve a press distribution between a first heat absorbing layer and a second heat absorbing layer. CONSTITUTION: A method for manufacturing an infrared ray bolometer having a first and a second sacrificing layer(300,310) comprises steps of depositing a first heat absorbing layer(292) on an upper portion of the second sacrificial layer, patterning and forming an element of an infrared ray bolometer after forming a titanium layer on the first heat absorbing layer, depositing a second heat absorbing layer on the first heat absorbing layer to encapsulate the element of the infrared ray bolometer, depositing a third sacrificial layer(320) on the second heat absorbing layer and removing the first, the second and the third sacrificial layers at the same time.
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