| 摘要 |
<p>An elastomeric formed article which is prepared by crosslinking and forming a crosslinkable elastomeric composition comprising a silicon oxide filler having a content of the impurity metals other than silicon of 100 ppm or less and a fluorine-containing elastomer component, and which has a content of impurity metals of 100 ppm or less, and which shows a rate of increase of particles by the irradiation of oxygen plasma of 1,000 % or less, or an amount of impurity metals other than silicon being extracted with 50 % HF of 200 ppb or less. The elastomeric formed article is extremely clean and is excellent in the resistance to plasma and the resistance to extraction therefrom of impurity metals, and thus is suitable as a formed article or its material for use in a manufacturing apparatus for a semiconductor and a liquid crystal.</p> |
